Users Guide for Rm 8096 and 8097: The Mems 5-In-1, 2013 Edition U.S. Department of Commerce

ISBN: 9781499211931

Published: April 28th 2014

Paperback

254 pages


Description

Users Guide for Rm 8096 and 8097: The Mems 5-In-1, 2013 Edition  by  U.S. Department of Commerce

Users Guide for Rm 8096 and 8097: The Mems 5-In-1, 2013 Edition by U.S. Department of Commerce
April 28th 2014 | Paperback | PDF, EPUB, FB2, DjVu, audiobook, mp3, ZIP | 254 pages | ISBN: 9781499211931 | 6.52 Mb

The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material propertyMoreThe Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch.

Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.



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